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ASML DUV光刻机有多快？加速度高达7g、12秒完成一整片晶圆

Published: August 21, 2021

作为芯片生产过程中最关键装备的光刻机，有着极高的技术壁垒，有“半导体工业皇冠上的明珠”之称，代表着人类文明的智慧结晶。

Source: techweb.com.cn

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