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A superior process for the SiC superjunction

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United statesIsik kizilyalliUs department of energyGe researchInternational symposium on power semiconductor devicesResearch projects agencySwitzerland ltdBreakthrough powerMedium voltageAdvanced research projects agency energyAward numberProgram director isikUnited states governmentDynamic characteristicsSic superjunctionMulti epitaxial growth method

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