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Researchers at UNIST’s Graduate School of Semiconductors Materials and Devices Engineering and Department of Materials Science and Engineering, under the direction of Professor Soo-Hyun Kim, have made significant strides toward the discovery of precisely controlled atomic layer deposition (ALD) incorporation of precious metals (Ru, Ir, Pt, and Pd).

Megan craigDebananda mohapatraSoo hyun kimProfessor researchNational research foundationSchool of semiconductors materialsMinistry of scienceSemiconductors industryDepartment of materials scienceUlsan national institute of science technologySemiconductors materialsDevices engineeringMaterials scienceProfessor soo hyun kimUlsan national instituteIndustry focus