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Unique X-ray Topography Based Defect Characterization for SiC Wafers Honored with Georg Waeber Innovation Award 2023

A cross-organizational team from Rigaku SE and Fraunhofer IISB has established a new semiconductor material characterization method in their jointly operated Center of Expertise for X-ray Topograp ...
Michael Hippler Christian Kranert Christian Reimann Materials Department V Microelectronics Promotion Society Nuremberg Chamber

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