EUV Pellicles Ready For Fabs, Expected to Boost Chip Yields

EUV Pellicles Ready For Fabs, Expected to Boost Chip Yields and Sizes


Foundries started limited usage of extreme ultraviolet (EUV) lithography for high-volume manufacturing (HVM) of chips in 2019. At the time, ASML's Twinscan NXE scanners were good enough for production, but the full EUV ecosystem was not quite there. One of the things that impacted EUV was the lack of protective pellicles for photomasks, which limited usage of EUV tools and affected yields. Fortunately, the situation with pellicles has finally improved thanks to the recent introduction of production-ready EUV pellicles, and matters promise to get even better in the coming years.
Protecting Precious Reticles
ASML has made a great progress with its Twinscan NXE EUV lithography tools in the recent years, improving performance of light source, availability time, and productivity. Its industry peers have also done a lot to make high-volume manufacturing (HVM) using EUV equipment possible. Still, the EUV ecosystem needs to develop further. One of the most notorious challenges the semiconductor supply chain faced with EUV is development of pellicles that were not available two years ago, which is why TSMC and Samsung Foundry had to invent ways how to use their EUV scanners without protective films.

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, Joost Bekaert , Graphene Square , Raymond Maas , Emily Gallagher , Semiconductor Engineering , Intel , Mitsui , Samsung Foundry , Image Credit , Mitsui Chemicals , Freudenberg Sealing Technologies , Bits Chips , ஜூஸ்ட் பெகேர்த் , ரேமஂட் மாஸ் , எமிலி கல்லாகர் , குறைக்கடத்தி பொறியியல் , இன்டெல் , மிட்ஸ்யூயீ , சாம்சங் ஃபவுண்டரி , படம் கடன் , மிட்ஸ்யூயீ இரசாயனங்கள் , ஃப்ரூடன்பெர்க் சீல் தொழில்நுட்பங்கள் , பிட்கள் சீவல்கள் ,

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