Plumbing the Depths: Defect Distribution in Ion-Implanted Si

Plumbing the Depths: Defect Distribution in Ion-Implanted SiC Diodes

Plumbing the Depths: Defect Distribution in Ion-Implanted SiC Diodes

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Nagoya , Aichi , Japan , Masashi Kato , Nagoya Institute Of Technology , Nagoya Institute Of Technology Nitech , Japan Society Of Applied Physics , Creative Engineering Program , Professor Of Semiconductor Physics , Defect Distribution , Ion Implanted Sic , Physica Status Solidi , Associate Professor , Nagoya Institute , Sic Pin , Engineering Program , Professor Masashi Kato , Computer Engineering , Semiconductor Physics , Japan Society , Applied Physics ,