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New DUV Laser Delivers Enhanced Power and Patterning

In science and technology, utilizing coherent light sources in the deep ultraviolet (DUV) region is highly significant for numerous applications including lithography, defect inspection, metrology, and spectroscopy. ....

Hongwen Xuan , Chinese Academy Of Sciences , Aerospace Information Research Institute , Delivers Enhanced Power , Chinese Academy , Advanced Photonics , Study Corresponding Author , Aerospace Information Research ,