IT News Online - Hitachi High-Tech Launches the GT2000, High-Precision Electron Beam Metrology System to Meet the Needs of Semiconductor Devices Development and Mass Production in the High-NA EUV Generation
Hitachi High-Tech Launches the GT2000, High-Precision Electron Beam Metrology System to Meet the Needs of Semiconductor Devices Development and Mass Production in the High-NA EUV Generation