Imec first to demonstrate conductor films on 300mm wafers with lower resistivity than Cu and Ru
LEUVEN (Belgium), MAY 23, 2023— This week, at the 2023 IEEE International Interconnect Technology Conference (2023 IEEE IITC), imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, provides the first experimental evidence that the resistivity of a thin conductor film on a 300mm Si wafer can be lower than that of Cu…