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Imec first to demonstrate conductor films on 300mm wafers with lower resistivity than Cu and Ru - Vimarsana News

Imec first to demonstrate conductor films on 300mm wafers with lower resistivity than Cu and Ru

LEUVEN (Belgium), MAY 23, 2023— This week, at the 2023 IEEE International Interconnect Technology Conference (2023 IEEE IITC), imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, provides the first experimental evidence that the resistivity of a thin conductor film on a 300mm Si wafer can be lower than that of Cu…

What is Nanosecond Pulsed Laser Annealing? - Vimarsana News

What is Nanosecond Pulsed Laser Annealing?

Nanosecond pulsed laser annealing is a controlled and selective heat treatment process to achieve desired material properties. Here, we take a look at nanosecond pulsed laser annealing, its advantages over other annealing techniques, and recent research findings.

Imec Shows Path to Line Resistance Halving using Semi-Damascene with High-Aspect-Ratio Processing - Vimarsana News

Imec Shows Path to Line Resistance Halving using Semi-Damascene with High-Aspect-Ratio Processing

LEUVEN (Belgium), June 30, 2022— This week, at the 2022 IEEE International Interconnect Technology Conference (IITC 2022), imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, presents options to reduce the metal line resistance at tight metal pitches, mitigating the resistance/capacitance (RC) increase of future interconnects using direct metal patterning. For the…