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Nanoelectronics Fabrication: A Focus on Lithography

Here, we offer a comprehensive summary of the methods utilized in manufacturing nanoelectronics, with a particular emphasis on lithography techniques, which have contributed significantly to the advancement of electronics since their inception.

Elsevier , Semiconductors-industry , Lithography-over-conventional , Industry-focus , Silicon-wafer , Computer-chip-manufacturing , Their-commercial , Ion-beam-lithography , Nanoscale-lithography , Lithography , Anoelectronics-fabrication