Detoxifying exhaust gas from device production processes
E-Mail IMAGE: New abatement device developed in this study. In the abatement device developed in this study, Low explosion limit of flammable gas in the piping is raised by reducing the... view more Credit: Kanken Techno Co.,Ltd Manufacturing process for industries of electronics, such as semiconductors, flat panel displays, and solar batteries uses dangerous toxic and flammable gases, such as silane gas and hydrogen gas. Currently, to detoxify these dangerous gases, a thermal oxidation reaction, in which they are heated to 1000? or more and decomposed is mainly used. For exampl...
Source: eurekalert.org