Strengthening the case for Plasma Polish
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Source: compoundsemiconductor.net
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Oxford Instruments : Advanced Metrology for SiC Crystal Quality Improvement -Today at 06:58 am
31 August 2023 Advanced Metrology for SiC Crystal Quality Improvement Oxford Instruments Confirms Crystal Quality Improvement for SiC Substrate Polishing...
Source: marketscreener.com
Oxford Instruments Validates Power Devices with Technology Acceleration Partner Clas-SiC
Recently Oxford Instruments announced the launch of their SiC substrate contactless plasma polishing solution. The aim of this technology is to supersede the established chemical mechanical planarization CMP process, with a clean, dry, lower cost, higher yield and sustainable alternative.
Source: azom.com