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Jena's development of compact high-power EUV source wins Hugo Geiger Award

Published: March 27, 2023

Full EUV power at “laboratory scale” achieved by Robert Klas from Friedrich Schiller University.

Source: optics.org

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Robert KlasFriedrich Schiller University JenaFriedrich Schiller UniversityHelmholtz Institute JenaFraunhofer Institute For Applied OpticsHugo GeigerFriedrich SchillerHugo Geiger AwardFraunhofer InstituteApplied OpticsPrecision EngineeringLean TechnologiesLife ScienceAterials ProcessingUyers GuidePress ReleasesPtics Org