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Plasma De-Contaminator for UHV Chambers: Evactron® U50 : Quote, RFQ, Price and Buy


The Evactron U50 Plasma De-Contaminator is a compact, simple plasma cleaner featuring high performance for chambers and instruments engineered to function at UHV conditions. The U50 offers high power cleaning to eliminate hydrocarbon contamination on sample and chamber surfaces.
The Evactron U50 De-Contaminator has been engineered for facilities that choose to use a wired touchpad interface to program cleaning parameters. An RS-232 cable is used to connect the touchpad (with dimensions of 134 × 112 × 69 mm) to the controller.
With a compact footprint, the simplified PRS makes use of UV afterglow and air plasma to minimize hydrocarbon contamination, delivering results quickly.
The design of the Evactron U50 Plasma Radical Source (PRS) is compact, making it a universal solution for sample prep chambers, load locks, or instrument chambers. The Evactron U50 provides effective, quick and robust cleaning across an extensive range of pressures, thus facilitating fast pump ....

Radical Source , Wired Touchpad Control , Plasma De Contaminator , Wired Touchpad , தீவிரமான மூல ,