Fault Detection in Semiconductor Etching Processes

In today's industries, quality inspection in semiconductor manufacturing is critical. Many traditional fault detection and diagnosis techniques have been developed to determine the existence of trends or patterns in the process or whether a specific process variable behaves normally.

Related Keywords

Blaise Manga Enuh ,Ieee Transactions On Semiconductor Manufacturing ,Transactions On Semiconductor Manufacturing ,Semiconductor Etching Important ,Etch Technology Used In Semiconductor Manufacturing ,Fault Detection ,Semiconductor Etching ,Detection Methodologies During ,Semiconductor Manufacturing ,Deep Learning Methodology ,Etch Technology Used ,Optical Emission Spectroscopy Data ,Mass Flow Controller ,Plasma Etch ,Itching ,Emiconductor ,Optical Emission Spectroscopy ,