MEMS Nanoindenter Developed for AFM Nanomechanical Analysis

This article presents the advancement of MEMS nanoindenterfor AFM probes for nanomechanical analysis of soft materials.

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Waterloo ,Ontario ,Canada ,South Carolina ,United States ,Akanksha Urade ,Akanksha Urademar ,University Of Waterloo ,Development In Characterization Using ,Nanomechanical Measurement ,Characterization Using ,Integrated Circuit Scanning Probe Instruments ,Thin Films ,Afm ,Dems ,Materials ,