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Novel Script-controllable FIB-SEM System for Atom Probe Tomography

This study discusses atom probe tomography (APT) and the feasibility of using a novel script-controlled focused ion beam-scanning electron microscopy (FIB-SEM) system for tip fabrication to improve the reliability and reproducibility of the APT technique.
Gorodenkoff Shutterstock Cameca Ap Suite Software Samudrapom Dammar Materials Industry Focus Shape Fabrication Using Thermo Fisher Scientific Helios
Source: azom.com

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