Detecting Defects in Microelectronics Using Particle Analysi

This article discusses using particle size analysis techniques to detect defects in silicon carbide (SiC), a wide-bandgap semiconductor used in microelectronic devices.

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Pafnuti Shutterstock , Nanoscale Research Letters , Microelectronics Using Particle , Defect Detection , Sic Device , Materials Industry Focus , Defect Inspection Techniques , Abrasive Machining Processes , Second Edition , Particle Size Analysis Techniques , Stmicroelectronics , Article Analysis ,