MEMS Nanoindenter Developed for AFM Nanomechanical Analysis

This article presents the advancement of MEMS nanoindenterfor AFM probes for nanomechanical analysis of soft materials.

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Waterloo , Ontario , Canada , South Carolina , United States , Akanksha Urade , Akanksha Urademar , University Of Waterloo , Development In Characterization Using , Nanomechanical Measurement , Characterization Using , Integrated Circuit Scanning Probe Instruments , Thin Films , Afm , Dems , Materials ,