Metasurface-based miniaturized spectroscopic ellipsometer :

Spectroscopic ellipsometry has been widely adopted for the measurement of thin film thickness as well as its optical constant. However, conventional ellipsomete

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Guoqiang , Fujian , China , Yuanmu Yang , Guoqiang Institute , National Natural Science Foundation Of China , Tsinghua University , Light Science , Professor Yuanmu Yang , National Natural Science Foundation , Newswise , Etasurface Array , All Journal News , Engineering , Technology , Chinese Academy Of Sciences ,