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Study demonstrates atomic layer deposition route to scalable, electronic-grade van der Waals tellurium thin films

Study demonstrates atomic layer deposition route to scalable, electronic-grade van der Waals tellurium thin films
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Joonki Suh , Changhwan Kim , School Of Semiconductor Materials , Department Of Materials Science , Professor Joonki Suh , Materials Science , Graduate School , Semiconductor Materials , Devices Engineering , Professor Seo , Atomic Layer Deposition Route , Waals Te Thin Films ,