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Why Optimal TKD and EBSD Results Require Evactron® Plasma Cleaning Sponsored by XEI ScientificMay 13 2021 In-situ plasma cleaning is crucial to avoid gradual contamination of vacuum chamber surfaces and samples at the time of analysis and characterization of nanocrystalline materials and nanostructures. A plasma cleaner is an essential accessory for the quick and efficient removal of hydrocarbon contamination from samples and vacuum chambers. ® plasma radical source functions at turbopump pressures and can produce low-temperature RF plasma with the help of its special RF hol...

Sponsored by XEI ScientificMar 4 2021 In order to avoid progressive contamination of samples and vacuum chamber surfaces during analysis and characterization of nanocrystalline materials and nanostructures, in-situ plasma cleaning is essential. For effectively and rapidly eliminating hydrocarbon contamination from samples and vacuum chambers, a necessary accessory is a plasma cleaner. The Evactron plasma radical source operates at turbopump pressures and can generate a low temperature RF plasma using its unique RF hollow cathode, allowing it to create oxygen radicals when air is the feed gas....