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Aixtron CVD system begins production of large-area graphene layers


Aixtron CVD system begins production of large-area graphene layers
As part of the research project GIMMIK (Graphene processing on 200mm wafers for microelectronic applications), a new industrial-grade chemical vapor deposition (CVD) reactor for processing graphene and hexagonal boron nitride (hBN) - developed, built and installed by Aixtron SE of Herzogenrath, near Aachen, Germany - has gone into operation for the production of large-area graphene layers.
Building on the existing knowledge of showerhead-based CVD systems, the reactor specially developed for this application is able to achieve the tight product specification needed for industrial application of these materials.
The GIMMIK project should lead to the industrial application of graphene and hBN, so the production of graphene layers is hence to be evaluated under industrial conditions. The consortium partners are developing methods to ensure consistently high graphene and hBN quality as a basis ....

Nordrhein Westfalen , Michael Heuken , Aachen University , Leibniz Institute For Innovative Microelectronics , Germany Federal Ministry Of Education , Innovative Microelectronics , Federal Ministry , னோற்ர்ேன் வெஸ்ட்ஃபாலன் , ஆச்சென் பல்கலைக்கழகம் , ஜெர்மனி கூட்டாட்சியின் அமைச்சகம் ஆஃப் கல்வி , புதுமையானது மைக்ரோ எலக்ட்ரானிக்ஸ் , கூட்டாட்சியின் அமைச்சகம் ,