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A superior process for the SiC superjunction
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United States
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Isik Kizilyalli
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Us Department Of Energy
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Ge Research
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International Symposium On Power Semiconductor Devices
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Research Projects Agency
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Switzerland Ltd
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Breakthrough Power
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Medium Voltage
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Advanced Research Projects Agency Energy
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Award Number
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Program Director Isik
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United States Government
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Dynamic Characteristics
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Sic Superjunction
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Multi Epitaxial Growth Method
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Electron Devices Meet
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Low Specific
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Resistance Achieved
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V Class Sic Superjunction
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Power Semiconductor Devices
,
Theoretical Limit
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Sic Super Junction
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Trench Filling Epitaxial Growth
,
International Symposium
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Van De Graaff
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