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Thin-film Measurement Techniques for High-Vacuum and High-Temperature Processes

Published: May 4, 2023

SURAGUS and Fraunhofer FEP investigated measurement methods for the non-contact in-situ characterization of the electrical resistance of thin films under high vacuum and high temperature requirements.

Source: novuslight.com

Related Topics:

United StatesThomas PreuFraunhofer Institute For Organic ElectronicsSaxon State Ministry Of EconomicsSaxon State Ministry For EconomyPlasma TechnologyFraunhofer InstituteOrganic ElectronicsElectron BeamSaxon State MinistryFraunhofer FepThin Film Measurement