Researchers Use Pulsed Laser Deposition for Functional Oxide Integration

In a preproof in journal Thin Solid Films, researchers have realized the epitaxial TiN films on (100) Si by reactive pulsed laser deposition (PLD).

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Rajeev Kumar Rai ,Taha Khan ,Laura Thomson ,Taha Khanaug ,Pavan Nukala Srinivasan Raghavan ,Sandeep Vura ,Research Area ,Thin Solid Films ,Reactive Pulsed Laser Deposition ,Low Particulate Density ,Epitaxial Tin ,Functional Oxide ,Laser Deposition ,Although Ag Co ,Pavan Nukala ,Srinivasan Raghavan ,Thin Solid ,