Researchers Use Pulsed Laser Deposition for Functional Oxide Integration
In a preproof in journal Thin Solid Films, researchers have realized the epitaxial TiN films on (100) Si by reactive pulsed laser deposition (PLD).
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In a preproof in journal Thin Solid Films, researchers have realized the epitaxial TiN films on (100) Si by reactive pulsed laser deposition (PLD).
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