China falling behind in chip manufacturing equipment tech development A survey conducted by the Nikkei at Semicon in Shanghai finds that Chinese chip manufacturing equipment makers are falling behind in their technology development. Difficulties in getting parts and materials from abroad were cited. “Our mainstay lithography machines are 90 nanometer models. Our 28 nm and 14 nm models have room for improvement in terms of yield rates,” said an engineer from Shanghai Micro Electronics Equipment, about the only Chinese maker of lithography machines. The Nikkei surveyed over 20 manufacturers from mainland China. Etching equipment supplier, Beijing E-Town Semiconductor Technology, said it produced mainly 40 nm systems and some 28 nm systems.