EV Group and Silicon Austria Labs extend photonics collaboration
To boost development of wafer-level optics for micro cameras and mirrors, diffractive and automotive optics.
Source: optics.org
Stay updated with breaking news from Research Division Microsystems. Get real-time updates on events, politics, business, and more. Visit us for reliable news and exclusive interviews.
To boost development of wafer-level optics for micro cameras and mirrors, diffractive and automotive optics.
Austrian research centre Silicon Austria Labs (SAL) has received and installed multiple EV Group (EVG) lithography and resist processing systems at its MicroFab R&D cleanroom facility in Villach, Austria.
Expanded collaboration includes installation of EVG's LITHOSCALE® maskless exposure system, EVG®7300 UV-NIL system and complementary resist processing systems