New Solutions in Semiconductor Metrology
KLA Instruments™, a division of KLA Corporation, has expanded its defect inspection and metrology portfolio in 2023 to include new systems for semiconductor process development and control, including the Filmetrics® R54-300 sheet resistance mapping system, the F54-XYT-300 and F60-c film thickness mapping systems, and the Nano Indenter® G200X with the Semiconductor Pack.
Source: azonano.com