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A recently-published article in Thin Solid Films from KLA Instruments™ and EPFL investigates the relationship between film stress, film thickness and grain size for thin indium tin oxide (ITO) films.
KLA Instruments™, a division of KLA Corporation, has expanded its defect inspection and metrology portfolio in 2023 to include new systems for semiconductor process development and control, including the Filmetrics® R54-300 sheet resistance mapping system, the F54-XYT-300 and F60-c film thickness mapping systems, and the Nano Indenter® G200X with the Semiconductor Pack.
Batteries are widely used power sources that utilize electrochemical cells for powering various devices. Battery performance is impacted by intrinsic mechanisms of battery failure and degradation, which depends on the electrochemical and nanomechanical interactions of the constituent materials.
A nanoindenter is a versatile tool used to measure the mechanical properties of a material.
In this interview, KLA's Bryan Crawford explains everything there is to know about nanoindentation, the challenges that the field currently faces, and how they can be overcome.